DEKTAK Stylus Profilometer

A stylus profilometer is a contact-based profilometer that brings its stylus tip into direct contact with the measuring surface and traces the desired path to determine the topography of the surface. This is one of the early profilometry techniques that developed during surface characterization research. A stylus profilometer is mostly used in measuring the step heights and the sample features sizes that have been patterned on the surface. The thickness of the films deposited by various thin film techniques can be measured using this stylus profilometer. Moreover, the stress of the films can also be measured approximately in order to compare the results with that of AFM technique.

MAKE : BRUKER
MODEL NUMBER : DEKTAK XT


Technical Specifications:

Camera FOV : 0.275 to 2.2 mm
Stylus sensor : Low Inertia Sensor (LIS3)
Force : 1 - 15 mg
Stylus Radius : 12.5 µm and 2 µm (50 nm to 25 µm; HAR tips)
Stage : 100 mm to 150 mm
Scan length : 55 mm to 2 inches
Sample thickness : Upto 50 mm
Vertical Scan : 1 mm

Consultancy Charge Details:

Type Internal(Student & Staff) (Rs.) External Educational Institution / R&D) (Rs.) Industry(Rs.)
Thickness 345 575 805
Thickness+ Stress 460 690 920
Thickness + Stress + Roughness 575 805 1035

User Instuctions & Consultancy Form


Staff-Incharge:

Dr. D. Dinesh Kumar, Associate Professor (Research)


Contact Details:

Email ID : ddkumar86@gmail.com
Phone No. : Dr. D. Dinesh Kumar (+91- 9976563823)